Selection Guides: Hexapods, Translation Stages, Rotation Stages, Actuators
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| *Models |
*Load Capacity [kg] |
*Travel Ranges [mm] |
*Drive Options |
Notes |
PDF File |
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| F-206 HexAlign |
2 |
+/-6 mm, +/- 5 deg. |
DC Servo |
High-Resolution, HexAlign Six-Axis MicroMotion Robot & Alignment System |
Download PDF |
| M840 HexaLight |
20 |
up to 100 mm up to 60 deg |
DC Servo |
NEW: Lower Cost Hexapod. NEW: Now with optical metrology for alignment |
Download PDF |
| M850 Hexapod |
200 |
up to 60 mm up to 15 deg |
DC Servo |
Six-axis MicroMotion Robot |
Download PDF |
| P-587 6DOF-Piezo Nano-Scanning Stage |
|
XYZ, θxθyθz 800 µm / 10 mrad |
piezo/capacitive feedback |
sophisticated 6-axis closed-loop piezo nanopositining stage |
Download PDF |
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Micro Translation Stage Series (DC servo / stepper driven) |
| M110/11/12 Micro Translation Stages |
3 |
5, 15, 25 |
DC servo / stepper |
Lead Screw Drive: For lab and research use |
Download PDF |
| M110/11/12.2 Micro Translation Stages |
3 |
5, 15, 25 |
DC servo / stepper |
Ball Screw Drive: For industiral use (extended lifetime) |
Download PDF |
| M116 Micro Rotation Stage |
1.5 |
Continuous |
DC servo / stepper |
NEW: Very small, clear aperture, high resolution. Fits M110, M111, M112 |
Download PDF |
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Ultrasonic Piezo Linear Motor Driven Stages |
M661, M662 (open loop)
M663 (closed loop) |
0.5 |
20 |
Piezo Linear Motor |
NEW: Smallest Open and Closed-Loop Piezo Linear Motor Driven Stages |
Download PDF |
| M665 Translation Stage |
5 |
50 |
Piezo Linear Motor |
NEW: Closed-loop, Low Profile, up to 250 mm/s, XY mountable |
Download PDF |
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Ultrasonic Piezo Motors |
P-661 P-665 OEM Motors |
n/a |
n/a |
Piezo Linear Motor |
NEW: Ultra-small Piezo Linear Motors for OEMs |
Download PDF |
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| *Models |
*Load Capacity [kg] |
*Travel Ranges [mm] |
*Drive Options |
Notes |
PDF File |
| M227 DC Mike |
5 |
10, 25, 50 |
DC servo, piezo option |
High resolution, non-rotating tip |
Download PDF |
| M230 DC/Stepper Mike |
5 |
10, 25 |
DC servo / 2-phase stepper |
Integrated limit switches, compact, high resolution, non-rotating tip |
Download PDF |
| M235 DC/Stepper Mike |
5 |
20, 50 |
DC servo / 2-phase stepper |
Ball screw, high load, integrated limit switches, high resolution, non-rotating tip. NEW: compact 20 mm version |
Download PDF |
| M231 DC/Stepper Mike |
5 |
17 |
DC servo / 2-phase stepper |
High resolution, integrated limit switches |
Download PDF |
| M232 Compact DC/Stepper Mike |
5 |
17 |
DC servo / 2-phase stepper |
Ultra-compact, high resolution, integrated limit
switches |
Download PDF |
| M168 Stepper Mike |
5 |
10, 25, 50 |
5-phase / 2-phase stepper, piezo option |
High resolution, non-rotating tip, excellent repeatability |
Download PDF |
| P-853/854 PiezoMike |
1 |
6, 18 |
PiezoMike |
Sub-nanometer resolution |
Download PDF |
| M631/632/633 Mikrometers |
10 |
10, 25, 50 |
Manual micrometer |
Non-rotating tip, compact, excellent
repeatability |
Download PDF |
M619 M626 Mikrometers |
2-5 |
6, 10, 15, 18, 25 |
Manual micrometer |
Low friction, compact |
Download PDF |
| M653/655 Differential Mikrometers |
2 |
6, 20 |
Differential micrometer |
0.1 µm resolution, compact |
Download PDF |
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Translation Stages (manual, DC servo and stepper driven) |
| M310 Micro Translation Stage |
4 |
6 |
Manual / PiezoMike |
Ultra-compact, stainless steel |
Download PDF |
M331, M332, M333 Translation Stages |
4-20 |
5-50 |
Manual |
Crossed roller bearings |
Download PDF |
M105 M106 Translation Stages |
10 |
6, 18 |
Manual / Piezo and Motor Upgrade |
Crossed roller bearings, PiezoMike and DC Mike Upgrade |
Download PDF |
| M011 Side Drive Stages |
1 |
15 |
Manual / DC servo / Piezo fine range |
Low-profile, very straight and smooth motion, 10 nm resolution |
Download PDF |
| M014 Side Drive Stages |
5 |
25 |
Manual / DC servo / Piezo fine range |
Low-profile, very straight and smooth motion, clear aperture, 10 nm resolution |
Download PDF |
| M126 Compact Stages |
20 |
25 |
DC servo / stepper / manual |
Crossed roller bearings |
Download PDF |
| M400 Translation Stages |
50 |
50, 100, 150 |
DC servo / stepper |
Crossed roller bearings |
Download PDF |
| M605 Stages w/ Linear Scale |
20 |
25, 50 |
DC servo |
Linear Encoder, High Precision |
Download PDF |
| M505 Ballscrew Stages |
100 |
25, 50, 100, 150 |
DC servo / stepper |
Compact, Ballscrew |
Download PDF |
| M5x1 Ballscrew Stages |
100 |
102, 204, 306 |
DC servo / stepper, high accuracy |
Precise, Ballscrew, Linear Encoder, High Load |
Download PDF |
M5x1.5i IntelliStages |
100 |
102, 204, 306 |
Integrated controller, 5-phase stepper |
Integrated controller, multi-stage network feature |
Download PDF |
| M501 Elevation Stages |
10 |
12.5 |
DC servo |
Ballscrew Driven, Precise |
Download PDF |
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Rotation Stages |
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| *Models |
*Load Capacity [kg] |
*Travel Ranges [mm] |
*Drive Options |
Notes |
PDF File |
| M116 Micro Stage |
1.5 |
Continuous |
DC servo / stepper |
NEW: Very small, clear aperture, high resolution. Fits M110, M111, M112 |
Download PDF |
| M035 Modular Stages |
30 |
±9.5 |
Manual / piezo |
Compact, clear aperture, high resolution, piezo option |
Download PDF |
| M035 Modular Stages |
30 |
±9.5 |
Manual / DC servo / Piezo |
Compact, clear aperture, high resolution, piezo option |
Download PDF |
| M036 Modular Stage |
40 |
±10.5 |
Manual / Piezo |
Clear aperture, high resolution, piezo option |
Download PDF |
| M036 Modular Stages |
40 |
±10.5 |
Manual / DC servo / Piezo |
Clear aperture, high resolution, piezo option |
Download PDF |
| M037 Continuous Stages |
30 |
Continuous |
Manual / DC servo / stepper |
Compact, clear aperture, high resolution |
Download PDF |
| M038 Continuous Stages |
40 |
Continuous |
Manual / DC servo / stepper |
Clear aperture, high resolution |
Download PDF |
M060, M061, M062 Continuous Stages |
50 - 65 |
Continuous |
Manual / DC servo / stepper |
Compact, clear aperture, high resolution, high speed |
Download PDF |
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Tilt and Tip/Tilt Stages |
| M041 |
4 |
±9 |
Manual / DC servo / Piezo fine range |
Compact, high resolution, piezo option |
Download PDF |
| M042 |
4 |
±9 (θx, θy) |
Manual / DC servo / Piezo fine range |
Compact, high resolution, piezo option |
Download PDF |
| M043 |
5 |
±7 |
Manual / DC servo / Piezo fine range |
High resolution, piezo option |
Download PDF |
| M044 |
5 |
±7 (θx, θy) |
Manual / DC servo / Piezo fine range |
High resolution, piezo option |
Download PDF |
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| V-102 Voice Coil Scanner |
0.1 |
5 |
Voice-coil linear motor |
Fast scanning systems, X and XY |
Download PDF |
| V-106 Voice Coil Scanner |
0.1 |
6 |
Voice-coil linear motor |
Fast scanning systems, X and XY |
Download PDF |
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| *Custom designs for volume buyers |