Motorized Micro-Positioners, Hexapods and Precision Motion Systems

High-precision micro-positioning stages, actuators, piezo motors, rotary stages, nanopositioning systems and multi-axis motion solutions for OEM, industrial and research applications.

Micro-Positioning Solutions

PI offers a large selection of high-precision micro-positioning systems, actuators and stages for OEM industry and research. The portfolio ranges from compact DC-Mike linear pushers and miniature stages to piezo linear-motor stages, fast linear-motor systems and hexapod 6-axis robot systems.

Use the overview below as a starting point for selecting the right motion technology: motorized linear stages for longer travel, piezo motors for compact self-locking motion, piezo flexure stages for nanometer-level positioning, and hexapods for compact 6-axis alignment.

Product Overview

How to Select a Micro-Positioning Stage

Start with the motion requirement

  • Travel range and number of axes
  • Payload, orientation and moving mass
  • Required resolution, repeatability and accuracy
  • Velocity, acceleration and settling time
  • Space envelope and mounting constraints

Match the drive technology

  • Stepper/DC motor stages: general-purpose positioning over longer travel
  • Linear motor stages: higher speed, smooth motion and direct drive
  • Piezo motor stages: compact, self-locking micro-positioning
  • Piezo flexure stages: frictionless nanopositioning and scanning
  • Hexapods: compact 6-axis alignment with programmable pivot point

Typical Applications

Micro-positioning systems are used in optics and photonics alignment, microscopy, semiconductor inspection, metrology, laser processing, micro-assembly, material testing and research instrumentation. They position samples, probes, sensors, optics and tools with repeatable sub-micron to nanometer-level motion, depending on the stage technology and feedback system.

For demanding OEM systems, stages can be combined into XY, XYZ, rotary, goniometer or full 6-axis configurations. Controllers, software and application-specific fixtures can be supplied as part of an integrated motion subsystem.

Need help selecting a stage? Contact PI to discuss your motion, accuracy, load and integration requirements.