Introduction to Piezo Positioners, Flexure Nanopositioning & Scanning Stages


Nanofocusing/Scanning Drives
Multiaxis Stages (Parallel-Metrology)
Z-Stages / Actuators

Compact X / XY / XYZ Systems
Single Axis Stages
Stages with Aperture

6-Axis Stages
Piezo Tip/Tilt Mirrors
Piezo Actuators

PCI-Board Piezo Controllers
1-Channel Desktop Controllers
Digital Controllers

PI designs and manufactures the fastest, highest precision and highest quality piezo positioning & scanning systems in the world. With 30+ years of experience, PI has evolved into the world-leading supplier of nanopositioning solutions.
PI piezo nanopositioning systems are not limited by friction and incorporate sophisticated technologies such as parallel kinematic guiding systems, parallel metrology, capacitive feedback and ultra-reliable PICMA® piezo actuators.

ISO 9001-2000 Certified.
See Technologies that set PI apart for further information.

Piezo NanoPositioning and Scanning Stages Selection Guide

*Models Axes *Travel [µm] *Feedback Notes PDF File
Objective Nano-Focus Devices
P725
Long Range Piezo Microscope Objective Positioner		 Z 100, 250, 400 capacitive NEW: Extra long range, very compact & light weight Download PDF
P721.CDQ
Piezo Microscope Objective Positioner		 Z 100 capacitive NEW: Microscope objective positioner.
Now with QuickLock 		Download PDF
P720
Open-Loop Piezo Microscope Objective Positioners		 Z 100 capacitive, LVDT Microscope objective positioner Download PDF
P722, P723
Piezo Microscope Positioners		 Z 200, 350 LVDT Microscope objective positioner Download PDF
 
Open Loop Single Axis Stages
P280 Piezo NanoPositioning Stage X 30, 50, 100 no Low cost, XY and XYZ combinations Download PDF
P290 Vertical Piezo Positioner (Piezo Z-Stage) Z 1000 no Large travel range Download PDF
P287 Vertical /Tip/Tilt Piezo Positioner (Piezo Z-Tip/Tilt Stage Z, θx 700, 12 mrad no Large travel range Download PDF
Closed Loop, Single Axis Stages with Direct Metrology Feedback
Direct metrology measures the position of the moving platform rather than strain in the actuator (as is common with lower-precision piezo resistive strain gauge sensors). This results in higher linearity scans and provides superior responsiveness, resolution, repeatability and stability at the sub-nano-meter level. Download paper on state-of-the-art nanopositioning stages

An improvement of up to 3 orders of magnitude in dynamic linearity can be achieved with the Dynamic Digital Linearization option in the E-710 controller.

P783 Piezo Vertical Positioner Z 300 LVDT Large travel range, closed-loop, compact Download PDF
P772 Piezo NanoPositioner X 10 capacitive Ultra-compact, fast and accurate, smallest closed-loop stage with capacitive position feedback Download PDF
P780 Piezo NanoPositioner Stage X 80 LVDT Compact, fast, for small loads Download PDF
P750 Piezo NanoPositioner Stage X 75 capacitive, LVDT Extremely straight motion, very stiff Download PDF
P752 Piezo NanoPositioner Stage X 15, 30 capacitive Extremely fast and accurate, for FBG writing and disk drive test set ups Download PDF
P753 Piezo NanoPositioner Actuator/Stage Z & X 12, 25, 38 capacitive Very small and accurate, works as both stage and linear actuator Download PDF
NEW PIHera P620 Piezo NanoPositioner /Scanning Stage X (XY, Z) 100, 250, 500, 1000 capacitive NEW! Low Cost, Compact, Extremely Long Travel.
Now also in XY, Z and XYZ		 Download PDF
 
Multi Axis, Serial Kinematics Stages
*Models Axes *Travel [µm] *Feedback Notes PDF File
P281
P282 Piezo NanoPositioner Stages		 XY, XYZ 30, 50, 100 no Low cost, compact Download PDF
P611 NanoCube XYZ Piezo Stage XYZ 100 SGS Smallest XYZ closed-loop stage Download PDF
P762 Series Piezo Nano-Scanning Stage X, XY, XYZ, Z,
Zθxθy, XYZθxθy		 100, ±2.6 mrad LVDT Compact, 20 X 20 mm clear aperture Download PDF
P620 - P625 X, XY, XYZ / Piezo-Z-Stage, Multi-Axis Piezo Stage X, XY, Z, XYZ 50,100,250, 500 capacitive NEW: Very Compact, Long Travel, Low Cost, Very Precise. Direct Metrology Download PDF
 
Multi-Axis, Parallel Metrology, Parallel Kinematics Stages
Parallel metrology can "see" all controlled degrees of freedom simultaneously. These stages provide superior trajectory control to serial kinematics stages. Download paper on state-of-the-art nanopositioning stages

An improvement of up to 3 orders of magnitude in dynamic linearity can be achieved with the Dynamic Digital Linearization option in the E-710 controller.

P615 NanoCube™ 350C XYZ Piezo NanoAligner XYZ to 350 capacitive NEW: Aperture. Ideal also for photonic alignment. Download PDF
P363 PicoCube™ XYZ, XY Piezo Scanner for AFM, SPM XY, XYZ 6 capacitive NEW: Extremely high resolution, compact, ideal for Nanotech and Biotech. Download PDF
P733 XY Piezo Nano- Scanning Stage XY 100x100 capacitive NEW: Standard Vacuum Version. Fast and accurate XY positioner, clear aperture Download PDF
 
P733.2DD, P733.3DD
Direct Drive XY, XYZ Piezo Nano- Scanning Stage		 XY, XYZ 30x30 (x10) capacitive NEW: 20 mm flat. Extremely fast, 2.2 kHz Fres, Direct Drive, UH-Vacuum available. Download PDF
P734 Extreme Flatness XY Piezo Nano-Scanning Stage XY 100 capacitive Fast and accurate XY positioner, clear aperture, extremely straight and flat motion Download PDF
P770 XY Piezo NanoPositioner Stage XY 200 LVDT 200 X 200 mm clear aperture Download PDF
P517, P527 Series
XY, XYZ, XYθz Piezo Nano-Scanning Stages 		XY, XYZ, XYθz Up to 200 in XYZ, 2 mrad capacitive Clear aperture, active trajectory control, special version with 6 degrees of freedom Download PDF
P561.3DD Series XYZ, High-Speed, Direct Drive Microscopy Piezo Nano-Scanning Stages XY, XYZ 45 XY, 11 Z capacitive NEW: Direct Drive, Ultra-Fast, Clear aperture, active trajectory control Download PDF
P561, P562, P562
PIMars Series Microscopy Piezo Nano-Scanning Stages 		XY, XYZ 100x100x100,
200x200x200,
300x300x250 		capacitive NEW: Up to 300x300x250 µm, High Speed, Clear aperture, active trajectory control Download PDF
         
P518, P528 Series
Piezo Z-Stage & Tip/Tilt 		Z, Zθxθy Up to 200 in Z, 2 mrad tip/tilt capacitive Clear aperture, active trajectory control, special version with 6 degrees of freedom Download PDF
"Piezo Hexapod" 6DOF Parallel-Kinematic Stages
P587
Hexapod 6DoF Piezo Nano Stage		 XYZ, θxθyθz 800 / 10 mrad capacitive Sophisticated 6-axis closed-loop stage Download PDF
Ultrasonic Piezo Linear Motor Driven Stages click here
 
*Custom dimensions, sensors, designs for volume buyers. Capacitive sensors and LVDT sensors are direct metrology sensors and provide the highest precision.

For piezo steering mirrors, tip/tilt positioners see the “Piezo Active Optics” section.