The patented PILIne® ultrasonic linear servo drives consist of a piezoelectric oscillator made from a rectangular piezoelectric plate.
The right or left electrode
of the piezo ceramic plate is
excited to produce highfrequency
(eigenmode) oscillations. An alumina
pusher attached to the
piezoceramic plate moves along an inclined linear
path at the resonant frequency.
In addition to resonant piezo servo motors, PI also offers the patented NEXLINE® PiezoWalk® nanodrives.
These long-travel nanopositioning motors are more complex
but can achieve even higher
resolution, forces and—over
small distances—dynamic performance.
Semicon Paper on NEXLINE® High-Force, PiezoWalk® nanopositioning drives.
Piezo Flexure Nanopositioning / Scanning Systems | 
